Tuning the electromechanical properties and polarization of Aluminium Nitride by ion beam-induced point defects
Holger Fiedler, Vedran Jovic, David R. G. Mitchell, Jérôme Leveneur, Emma Anquillare, Kevin E. Smith, J. Kennedy
Topics & Concepts
Materials scienceWurtzite crystal structurePiezoelectricityNitrideOptoelectronicsRaman spectroscopyCrystallographic defectCrystallographyOpticsComposite materialLayer (electronics)PhysicsMetallurgyChemistryZincGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesMetal and Thin Film Mechanics