Litcius/Paper detail

Atomic study on deformation behavior and anisotropy effect of 4C–SiC during nanoindentation

Bo Zhu, Dan Zhao, Yihan Niu, Hongwei Zhao, Hongwei Zhao

2023Materials Science in Semiconductor Processing11 citationsDOI

Topics & Concepts

Materials scienceNanoindentationDislocationNucleationAnisotropyDeformation (meteorology)Partial dislocationsCondensed matter physicsComposite materialDeformation mechanismOpticsMicrostructureThermodynamicsPhysicsSilicon Carbide Semiconductor TechnologiesMetal and Thin Film MechanicsAdvanced ceramic materials synthesis