Development and optimisation of a SiO<sub>2</sub> PVD technique based on the thermal decomposition of PDMS
Paul Cannon, E. McGlynn, Brian Freeland, Jennifer Gaughran
Abstract
Mass and heat rate dependant deposition of SiO 2 vapour species by controlled thermal degradation of PDMS on solid substrates.
Topics & Concepts
ChemistryThermal decompositionDegradation (telecommunications)DecompositionThermalDeposition (geology)Chemical engineeringChemical vapor depositionThermodynamicsOrganic chemistryTelecommunicationsPhysicsSedimentEngineeringPaleontologyComputer scienceBiologySemiconductor materials and devicesDiamond and Carbon-based Materials ResearchAnalytical Chemistry and Sensors