Equilibrium between chemical and mechanical parameters for single-crystal SiC in Electro-Fenton chemical-mechanical polishing
Jiayun Deng, Zilei Bai, Xiaoning Wen, Jie Geng, Jiabin Lu, Qiusheng Yan
Topics & Concepts
Chemical-mechanical planarizationPolishingMaterials scienceChemical reactionSingle crystalCrystal (programming language)Chemical stabilityMechanical strengthChemical engineeringChemistryComposite materialCrystallographyOrganic chemistryEngineeringProgramming languageComputer scienceAdvanced Surface Polishing TechniquesAdvanced ceramic materials synthesisDiamond and Carbon-based Materials Research