High precision orientation mapping from 4D-STEM precession electron diffraction data through quantitative analysis of diffracted intensities
Leonardo M. Corrêa, Eduardo Ortega, Arturo Ponce, M. A. Cotta, D. Ugarte
Topics & Concepts
DiffractionElectron diffractionOrientation (vector space)OpticsMisorientationMaterials scienceScanning transmission electron microscopyElectron backscatter diffractionPhysicsTransmission electron microscopyMathematicsGeometryMicrostructureMetallurgyGrain boundaryAdvanced Electron Microscopy Techniques and ApplicationsElectron and X-Ray Spectroscopy TechniquesIntegrated Circuits and Semiconductor Failure Analysis