Electronic phase transition in CrN thin films grown by reactive RF magnetron sputtering
Khan Alam, Mohammad B. Haider, M.F. Al-Kuhaili, Kh. A. Ziq, Bakhtiar Ul Haq
Topics & Concepts
Materials scienceThin filmSputter depositionBand gapSputteringChromium nitrideElectrical resistivity and conductivityCavity magnetronAnalytical Chemistry (journal)Phase (matter)NitrideArgonOptoelectronicsComposite materialNanotechnologyLayer (electronics)Atomic physicsChemistryEngineeringOrganic chemistryChromatographyPhysicsElectrical engineeringMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsSemiconductor materials and devices