A piezoresistive pressure sensor with centralized piezoresistors and a diamond-shape composite diaphragm
Qinggang Meng, Junbo Wang, Deyong Chen, Jian Chen, Bo Xie, Yulan Lu
Topics & Concepts
Wheatstone bridgePiezoresistive effectMaterials sciencePressure sensorDiaphragm (acoustics)DiamondSilicon on insulatorComposite materialComposite numberMicroelectromechanical systemsSiliconSensitivity (control systems)Nonlinear systemOptoelectronicsAcousticsElectronic engineeringElectrical engineeringVibrationMechanical engineeringEngineeringVoltagePhysicsQuantum mechanicsResistorAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Sensor and Energy Harvesting Materials