Magnetron deposition of chromium nitride coatings using a hot chromium target: Influence of magnetron power on the deposition rate and elemental composition
V.A. Grudinin, G.A. Bleykher, Dmitrii V. Sidelev, Yu.N. Yuriev, Антон Ломыгин
Topics & Concepts
ChromiumMaterials scienceSputter depositionChromium nitrideCavity magnetronSublimation (psychology)NitrideDeposition (geology)Physical vapor depositionSputteringAnalytical Chemistry (journal)Thin filmMetallurgyChemical engineeringComposite materialLayer (electronics)ChemistryNanotechnologyEnvironmental chemistryPsychologyPaleontologySedimentBiologyPsychotherapistEngineeringMetal and Thin Film MechanicsPlasma Diagnostics and ApplicationsGaN-based semiconductor devices and materials