Development of a new MEMS resonant differential pressure sensor with high accuracy and high stability
Chao Cheng, Yulan Lu, Jiahui Yao, Jian Chen, Deyong Chen, Junbo Wang
Topics & Concepts
BossSensitivity (control systems)Materials scienceMicroelectromechanical systemsFabricationPressure sensorFinite element methodDifferential pressureWeldingSurface micromachiningStress (linguistics)AcousticsOptoelectronicsElectronic engineeringMechanical engineeringStructural engineeringComposite materialEngineeringMechanicsMetallurgyPhysicsMedicineLinguisticsPhilosophyPathologyAlternative medicineAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies