Electrochemical etching of porous silicon – DFT modeling
F. A. Ptashchenko
Topics & Concepts
SiliconPorous siliconEtching (microfabrication)DissolutionElectrochemistryMaterials scienceIonic bondingImpurityElectrolyteIsotropic etchingBoronChemical engineeringChemical physicsInorganic chemistryChemistryNanotechnologyPhysical chemistryIonElectrodeOrganic chemistryMetallurgyLayer (electronics)EngineeringSilicon Nanostructures and PhotoluminescenceNanowire Synthesis and ApplicationsSemiconductor materials and devices