Wafer-scale 4H-silicon carbide-on-insulator (4H–SiCOI) platform for nonlinear integrated optical devices
Ailun Yi, Yi Zheng, Hao Huang, Jiajie Lin, Youquan Yan, Tiangui You, Kai Huang, Shibin Zhang, Chen Shen, Min Zhou, Wei Huang, Jiaxiang Zhang, Shengqiang Zhou, Haiyan Ou, Xin Ou
Topics & Concepts
Silicon carbideWaferSilicon on insulatorMaterials scienceOptoelectronicsNonlinear opticalNonlinear systemScale (ratio)Insulator (electricity)Engineering physicsElectronic engineeringSiliconNanotechnologyEngineeringMetallurgyPhysicsQuantum mechanicsPhotonic and Optical DevicesThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence