Surface morphology of polar, semipolar and nonpolar freestanding GaN after chemical etching
Haijian Zhong, Chunyu Zhang, Wentao Song, Kebei Chen, Yaohuan Sheng, Gengzhao Xu, Zhenghui Liu
Topics & Concepts
Etching (microfabrication)Plane (geometry)Morphology (biology)Materials scienceIsotropic etchingPolarEthylene glycolReagentSurface (topology)CrystallographyNanotechnologyChemistryGeometryLayer (electronics)Organic chemistryMathematicsGeneticsAstronomyPhysicsBiologyGaN-based semiconductor devices and materialsZnO doping and propertiesGa2O3 and related materials