Sensitivity of polarized laser scattering detection to subsurface damage in ground silicon wafers
Jingfei Yin, Qian Bai, Bi Zhang
Topics & Concepts
WaferMaterials scienceSiliconGrindingSubstrate (aquarium)OptoelectronicsSIGNAL (programming language)SemiconductorSensitivity (control systems)LaserResolution (logic)OpticsElectronic engineeringComputer scienceComposite materialEngineeringArtificial intelligenceGeologyPhysicsOceanographyProgramming languageAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisSurface Roughness and Optical Measurements