Corrosion of plasma sputtering medium entropy alloy thin film: A multidisciplinary perspective
Kai-Chi Chuang, Yu-Yen Chang, Ching‐Yu Chiang, Yun‐Chung Liu, Hao‐Hsuan Hung, Ko-Kai Tseng, Jien‐Wei Yeh, Hsiu‐Wei Cheng
Topics & Concepts
SputteringMaterials scienceCorrosionX-ray photoelectron spectroscopyAlloyThin filmMetallurgySputter depositionPlasmaHigh entropy alloysAnalytical Chemistry (journal)Chemical engineeringNanotechnologyChemistryQuantum mechanicsPhysicsChromatographyEngineeringHigh Entropy Alloys StudiesHigh-Temperature Coating BehaviorsMetal and Thin Film Mechanics