Microscopic vibration suppression for a high-speed macro-micro manipulator with parameter perturbation
Shuai Wang, Yiling Yang, Guoping Li, Hui-Lin Du, Yanding Wei
Topics & Concepts
Control theory (sociology)VibrationMacroPerturbation (astronomy)Nonlinear systemKalman filterVibration controlEngineeringComputer sciencePhysicsAcousticsControl (management)Programming languageArtificial intelligenceQuantum mechanicsPiezoelectric Actuators and ControlAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and Applications