Excellent diffusion barrier property of amorphous NbMoTaW medium entropy alloy thin films used in Cu/Si Connect System
Kun Hu, Qiang Hu, Xiandong Xu, S.H. Chen, Jiang Ma, Wanqing Dong
Topics & Concepts
Materials scienceAmorphous solidDiffusion barrierAnnealing (glass)MicrostructureGrain boundaryAlloySputter depositionThin filmSputteringGrain boundary diffusion coefficientComposite materialAnalytical Chemistry (journal)NanotechnologyCrystallographyChemistryLayer (electronics)ChromatographyHigh Entropy Alloys StudiesHigh-Temperature Coating BehaviorsAdvanced materials and composites