Effect of off-axis substrate angles on β-Ga2O3 thin films and solar-blind ultraviolet photodetectors grown on sapphire by MOCVD
Yongjian Ma, Wenbo Tang, Tiwei Chen, Li Zhang, Tao He, Xin Zhou, Xing Wei, Xuguang Deng, Houqiang Fu, Kun Xu, Xiaodong Zhang, Baoshun Zhang
Topics & Concepts
Materials scienceMetalorganic vapour phase epitaxyFull width at half maximumSapphireThin filmOptoelectronicsSubstrate (aquarium)PhotodetectorCrystal (programming language)Chemical vapor depositionOpticsUltravioletEpitaxyLayer (electronics)LaserNanotechnologyPhysicsOceanographyGeologyProgramming languageComputer scienceGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques