A surface acoustic wave hydrogen sensor with tin doped indium oxide layers for intermediate temperatures
Jagannath Devkota, Elizabeth Mao, David W. Greve, Paul R. Ohodnicki, John P. Baltrus
Topics & Concepts
Materials scienceIndium tin oxideIndiumSurface acoustic waveOptoelectronicsDopantDopingConductivityHydrogen sensorOxideAttenuationThin filmNanotechnologyOpticsChemistryPalladiumPhysical chemistryMetallurgyCatalysisPhysicsBiochemistryAcoustic Wave Resonator TechnologiesGas Sensing Nanomaterials and SensorsAnalytical Chemistry and Sensors