Catalytic mechanism of tribochemical mechanical polishing on (0001) C-face of single crystal 6H-SiC substrate
Mingpu Xue, Wen Xiao, Tianyi Zhang, Zhankui Wang, Jianxiu Su
Topics & Concepts
CatalysisMaterials sciencePolishingChemical engineeringDiffractometerSubstrate (aquarium)Surface roughnessScanning electron microscopeCrystal (programming language)NanotechnologyMetallurgyComposite materialChemistryOrganic chemistryGeologyEngineeringProgramming languageOceanographyComputer scienceAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization