High entropy nitride (HEN) thin films of AlCoCrCu0.5FeNi deposited by reactive magnetron sputtering
N. A. Khan, Behnam Akhavan, Cuifeng Zhou, Haoruo Zhou, Li Chang, Hongjian Wang, Yanping Liu, Marcela Bilek, Zongwen Liu
Topics & Concepts
Materials scienceThin filmX-ray photoelectron spectroscopyNanoindentationNitrideSputter depositionSputteringAmorphous solidScanning electron microscopeHigh entropy alloysAnalytical Chemistry (journal)Chromium nitrideSurface roughnessChemical engineeringMicrostructureComposite materialCrystallographyNanotechnologyChemistryEngineeringLayer (electronics)ChromatographyMetal and Thin Film MechanicsHigh Entropy Alloys StudiesDiamond and Carbon-based Materials Research