Heavy phosphorus doping of diamond by hot-filament chemical vapor deposition
Yūki Katamune, Akira Izumi, Kimiyoshi Ichikawa, Satoshi Koizumi
Topics & Concepts
Chemical vapor depositionDiamondMaterials scienceElectrical resistivity and conductivityDopingOhmic contactPhosphorusMaterial properties of diamondAnalytical Chemistry (journal)NanotechnologyOptoelectronicsChemistryMetallurgyEnvironmental chemistryLayer (electronics)Electrical engineeringEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsElectronic and Structural Properties of Oxides