Effect of accelerated hydrothermal aging on the durability of Si-based dielectric thin films
Sarah Rubeck, Vivien Cartailler, V. Coutellier, G. Imbert, Sébastien Gallois-Garreignot, Sylvain Meille, Philippe Steyer, Jean‐Pierre Chevalier
Topics & Concepts
Materials scienceHydrothermal circulationMicroelectronicsAbsorption of waterAbsorption (acoustics)DielectricSilanolComposite materialNanoindentationDurabilityResidual stressChemical engineeringNanotechnologyOptoelectronicsChemistryOrganic chemistryCatalysisEngineeringSemiconductor materials and devicesCopper Interconnects and ReliabilityAdvanced ceramic materials synthesis