Temperature effects on the structure and mechanical properties of vapor deposited a-SiO2
Vrishank Jambur, M. Molina-Ruiz, Thomas Dauer, Donez Horton-Bailey, Richard S. Vallery, David Gidley, Thomas Metcalf, Xiao Liu, F. Hellman, Izabela Szlufarska
Topics & Concepts
NanoindentationMaterials scienceAmorphous solidPorosityElastic modulusThin filmComposite materialChemical vapor depositionSubstrate (aquarium)ModulusElectron beam physical vapor depositionPhysical vapor depositionNanotechnologyCrystallographyChemistryOceanographyGeologyGlass properties and applicationsSemiconductor materials and devicesIon-surface interactions and analysis