Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators
Ming Lyu, Jian Zhao, Najib Kacem, Pengbo Liu, Bin Tang, Zhuang Xiong, Hongxi Wang, Yu Huang
Topics & Concepts
ResonatorSensitivity (control systems)Nonlinear systemParametric statisticsControl theory (sociology)Microelectromechanical systemsCoupling (piping)StiffnessVoltageHarmonic balanceBeam (structure)AmplitudePhysicsAcousticsCoupling coefficient of resonatorsMaterials scienceElectronic engineeringEngineeringOpticsComputer scienceOptoelectronicsMathematicsMetallurgyThermodynamicsQuantum mechanicsControl (management)Artificial intelligenceStatisticsMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator Technologies