Ultraviolet antireflective porous nanoscale periodic hole array of 4H-SiC by Photon-Enhanced Metal-assisted chemical etching
Yikai Liao, Sangho Shin, Munho Kim
Topics & Concepts
Etching (microfabrication)UltravioletMaterials scienceNanoscopic scaleIsotropic etchingDry etchingUltraviolet lightOptoelectronicsSilicon carbidePlasma etchingNanotechnologyPorosityReactive-ion etchingComposite materialLayer (electronics)Ga2O3 and related materialsSilicon Carbide Semiconductor TechnologiesZnO doping and properties