Recent advances in MEMS mass spectrometers
Yupeng Cheng, You-Jiang LIU, Jun Hu, Shan Li, Lei Shao, Zhang-Xu WU, Chilai Chen
Topics & Concepts
SpectrometerMass spectrometryMicroelectromechanical systemsMiniaturizationMicrofabricationQuadrupole mass analyzerHybrid mass spectrometerNanotechnologyMaterials sciencePhysicsSelected reaction monitoringOpticsTandem mass spectrometryAlternative medicineQuantum mechanicsPathologyMedicineFabricationMass Spectrometry Techniques and ApplicationsMicrofluidic and Capillary Electrophoresis ApplicationsMechanical and Optical Resonators