Electronic stopping in molecular dynamics simulations of cascades in 3C–SiC
Eva Zarkadoula, German Samolyuk, Yanwen Zhang, William J. Weber
Topics & Concepts
Stopping powerMolecular dynamicsIonIrradiationSilicon carbideAtomic physicsSiliconMaterials scienceElectronic structureDynamics (music)ChemistryNuclear physicsPhysicsOptoelectronicsComputational chemistryOrganic chemistryAcousticsMetallurgySilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis