Nanogratings fabricated by wet etching assisted femtosecond laser modification of silicon for surface plasmon resonance sensing
Meng Wu, Nianxi Xu, Erxi Wang, Shannan Gen, Huaxin Zhu, Cheng Liu, Jianjun Cao
Topics & Concepts
Materials scienceFemtosecondSurface plasmon resonanceGratingPlasmonEtching (microfabrication)SiliconOptoelectronicsLaserRefractive indexOpticsNanolithographySurface plasmonAmorphous siliconFabricationNanotechnologyCrystalline siliconNanoparticleLayer (electronics)PhysicsAlternative medicineMedicinePathologyPlasmonic and Surface Plasmon ResearchPhotonic and Optical DevicesOptical Coatings and Gratings