Impact of Strategic Approaches for Improving the Device Performance of Mesa-shaped Nanoscale Vertical-Channel Thin-Film Transistors Using Atomic-Layer Deposited In–Ga–Zn–O Channel Layers
Hyun-Min Ahn, Young-Ha Kwon, Nak‐Jin Seong, Kyu-Jeong Choi, Chi‐Sun Hwang, Sung‐Min Yoon
Topics & Concepts
Materials scienceAtomic layer depositionEtching (microfabrication)Layer (electronics)OptoelectronicsElectrodeChemical vapor depositionNanoscopic scaleIndiumDeposition (geology)NanotechnologyIonChemistryBiologyPaleontologyPhysical chemistryOrganic chemistrySedimentThin-Film Transistor TechnologiesSemiconductor materials and devicesZnO doping and properties