SiN-based platform toward monolithic integration in photonics and electronics

Wenjuan Xiong, Guilei Wang, Junfeng Li, Chao Zhao, Wenwu Wang, Henry H. Radamson

2021Journal of Materials Science Materials in Electronics13 citationsDOI

Topics & Concepts

PhotonicsMaterials scienceGermaniumStrain engineeringOptoelectronicsSilicon on insulatorSilicon photonicsSilicon nitrideLaserTensile strainStrained siliconSiliconElectronicsEngineering physicsUltimate tensile strengthElectrical engineeringOpticsEngineeringComposite materialCrystalline siliconPhysicsAmorphous siliconPhotonic and Optical DevicesAdvanced Fiber Laser TechnologiesAdvanced Fiber Optic Sensors