Ultraflat single-crystal hexagonal boron nitride for wafer-scale integration of a 2D-compatible high-κ metal gate
Yani Wang, Chao Zhao, Xin Gao, Liming Zheng, Jun Qian, Xiaoyin Gao, Jiade Li, Junchuan Tang, Congwei Tan, Jiahao Wang, Xuetao Zhu, Jiandong Guo, Zhongfan Liu, Feng Ding, Hailin Peng
Topics & Concepts
Materials scienceWaferNanotechnologyElectronicsDielectricOptoelectronicsSapphireChemical vapor depositionSingle crystalEpitaxyCrystal (programming language)Layer (electronics)CrystallographyElectrical engineeringChemistryOpticsComputer scienceProgramming languagePhysicsEngineeringLaserGraphene research and applicationsMXene and MAX Phase MaterialsSemiconductor materials and devices