Overview of residual stress in MEMS structures: Its origin, measurement, and control
Shankar Dutta, Akhilesh Pandey
Topics & Concepts
Microelectromechanical systemsResidual stressFabricationMaterials scienceActuatorReliability (semiconductor)ResidualCharacterization (materials science)NanotechnologyComputer scienceElectronic engineeringEngineeringComposite materialArtificial intelligenceQuantum mechanicsAlgorithmPathologyPower (physics)PhysicsMedicineAlternative medicineMetal and Thin Film MechanicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimization