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Achieving excellent ferroelectric and dielectric performance of HfO2/ZrO2/HfO2 thin films under low operating voltage

Fei Yan, Jiajia Liao, Ke Cao, Shijie Jia, Yichun Zhou, Min Liao, Min Liao

2023Journal of Alloys and Compounds22 citationsDOI

Topics & Concepts

Materials scienceDielectricFerroelectricityOptoelectronicsThin filmVoltageNanotechnologyElectrical engineeringEngineeringFerroelectric and Negative Capacitance DevicesFerroelectric and Piezoelectric MaterialsSemiconductor materials and devices
Achieving excellent ferroelectric and dielectric performance of HfO2/ZrO2/HfO2 thin films under low operating voltage | Litcius