Achieving excellent ferroelectric and dielectric performance of HfO2/ZrO2/HfO2 thin films under low operating voltage
Fei Yan, Jiajia Liao, Ke Cao, Shijie Jia, Yichun Zhou, Min Liao, Min Liao
Topics & Concepts
Materials scienceDielectricFerroelectricityOptoelectronicsThin filmVoltageNanotechnologyElectrical engineeringEngineeringFerroelectric and Negative Capacitance DevicesFerroelectric and Piezoelectric MaterialsSemiconductor materials and devices