Effect of modulation period on microstructure and mechanical properties of (AlSiTiVNbCr)N/(AlSiTiVNbCr)CN nano-multilayer films
Wenting Shao, WU Shang-kun, Wei Yang, Jiahua He, Shuaidan Lu, Dapeng Xu, Jian Chen
Topics & Concepts
Materials scienceMicrostructureHigh-resolution transmission electron microscopyTransmission electron microscopyScanning electron microscopeComposite materialGrain sizeDiffractionNano-Elastic modulusNanoindentationAnalytical Chemistry (journal)Sputter depositionElectron diffractionSelected area diffractionThin filmSputteringOpticsNanotechnologyChemistryChromatographyPhysicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites