Characterization of Mo-6Ta alloy targets and its magnetron sputtering deposited thin film
Jiwen Li, Zhenhua Fu, Wei Liu, Guoshang Zhang, Shizhong Wei, Liujie Xu, Kunming Pan, Jie Shen, Jinghong Yang
Topics & Concepts
Materials scienceSputter depositionSputteringMetallurgyMicrostructureGrain sizeMolybdenumThin filmScanning electron microscopeTantalumAlloyElectron backscatter diffractionHigh-power impulse magnetron sputteringComposite materialNanotechnologyMetal and Thin Film MechanicsIntermetallics and Advanced Alloy PropertiesSemiconductor materials and interfaces