Next Generation Of BAW: The New Benchmark for RF Acoustic Technologies
Andreas Tag, Michael Schaefer, Jyothi Sadhu, Alireza Tajic, Paul Stokes, Milad Zolfagharloo Koohi, Waleed Yusuf, Wolfgang Heeren, Hedy Fatemi, F. G. Celii, Jaime Trujillo, Cho Chanseob, Yanghua He, Eliot Silbar, Erika Fuentes, Thomas Berer, Mudar A. Al-Joumayly, Ralph Rothemund
Abstract
New Generation of BAW Technology has been developed. It supports the full frequency range from 1 GHz to above 8 GHz including the 5G NR and WiFi6E frequency bands. Furthermore, it provides significant improvements in resonator performance: up to 100% higher Q, over 50 % TCF improvement and improved modes behavior. It also makes Sc doping or higher Sc doping applicable to more frequency bands. Moreover, the resonator size could be decreased significantly at the same time. Thus, filters have better power handling, IL and rejection in pair with device shrinkage of up to 50 %.