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Selective passivation of 2D TMD surface defects by atomic layer deposited Al2O3 to enhance recovery properties of gas sensor

Inkyu Sohn, S. C. Wi, Youngjun Kim, Dain Shin, Myoungsub Kim, Sangyoon Lee, Hwi Yoon, Jisang Yoo, Seung‐min Chung, Hyungjun Kim, Seung‐min Chung, Hyungjun Kim

2023Applied Surface Science30 citationsDOI

Topics & Concepts

PassivationX-ray photoelectron spectroscopyNucleationMaterials scienceChemisorptionRaman spectroscopyAtomic layer depositionAnalytical Chemistry (journal)PhotoluminescenceLayer (electronics)DopingAdsorptionNanotechnologyChemical engineeringChemistryOptoelectronicsPhysical chemistryOpticsChromatographyEngineeringOrganic chemistryPhysicsGas Sensing Nanomaterials and Sensors2D Materials and ApplicationsTransition Metal Oxide Nanomaterials
Selective passivation of 2D TMD surface defects by atomic layer deposited Al2O3 to enhance recovery properties of gas sensor | Litcius