Advances in direct optical lithography of nanomaterials
Yuelin Yang, Jie Guan, Nannan Zhang, Lin Ru, Yihao Zou, Yuanyuan Wang
Abstract
This review presents recent advancements in direct optical lithography of nanomaterials, covering the technique's evolution, key patterning strategies, applications, and future research directions.
Topics & Concepts
NanomaterialsNanotechnologyLithographyMaterials scienceOptoelectronicsNanofabrication and Lithography TechniquesPhotonic and Optical DevicesOptical Coatings and Gratings