Designing MEMS accelerometer for enhanced sensitivity and reduced cross-sensitivity in landslide monitoring
Hossein R. Najafabadi, Tiago G. Goto, Thiago C. Martins, Marcos de Sales Guerra Tsuzuki, Ahmad Barari
Topics & Concepts
AccelerometerSensitivity (control systems)Surface micromachiningBulk micromachiningTopology optimizationMicroelectromechanical systemsAccelerationEngineeringElectronic engineeringSimulated annealingTopology (electrical circuits)Computer scienceMaterials scienceStructural engineeringElectrical engineeringNanotechnologyFinite element methodPhysicsAlgorithmOperating systemMedicinePathologyAlternative medicineFabricationClassical mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Fiber Optic Sensors