Evolution of ring structures and method for inhibition in polishing of fused silica
Qing Mu, Xing Gao, Ying Yan, Ping Zhou
Topics & Concepts
PolishingChemical-mechanical planarizationTime evolutionMaterials scienceRing (chemistry)Chemical physicsNanoscopic scaleBreakageHydroxylationMolecular dynamicsNanotechnologyCrystallographyComposite materialChemistryComputational chemistryPhysicsEnzymeQuantum mechanicsBiochemistryOrganic chemistryAdvanced Surface Polishing TechniquesGlass properties and applicationsPhotonic Crystals and Applications