Vapor‐phase synthesis of <scp>MOF</scp> films
Myeonggeun Choe, H.K. Lee, Hee Cheul Choi
Abstract
Abstract Fabrication of thin films is the most crucial step in introducing promising new materials into practical devices. Among the various materials, metal–organic framework (MOF) thin films have gained widespread attention with the advantage of diverse applications. In this review, two representative vapor‐phase synthetic methods, (1) molecular layer deposition (MLD), (2) chemical vapor deposition (CVD) are addressed as emerging techniques.
Topics & Concepts
Vapor phasePhase (matter)ChemistryChemical engineeringMaterials scienceOrganic chemistryPhysicsEngineeringThermodynamicsMetal-Organic Frameworks: Synthesis and ApplicationsGas Sensing Nanomaterials and SensorsMachine Learning in Materials Science