Precursors for chemical vapor deposition of tungsten oxide and molybdenum oxide
Nathan C. Ou, Xiaoming Su, Duane C. Bock, Lisa McElwee‐White
Topics & Concepts
ChemistryChemical vapor depositionMolybdenumTungstenStoichiometryInorganic chemistryDeposition (geology)MetalOxideCombustion chemical vapor depositionLayer (electronics)DecompositionMetalorganic vapour phase epitaxyThin filmChemical engineeringNanotechnologyOrganic chemistryCarbon filmEpitaxyMaterials scienceEngineeringPaleontologyBiologySedimentSemiconductor materials and devicesElectronic and Structural Properties of OxidesZnO doping and properties