Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture
Ye Wan, Wenhui Guo, Jin Xiao, Dazhou Yan, Xiong Zhao, Shuhu Guo, Jianhua Liu, Qifan Zhong, Tao Yang, Yu Zhao, Xin Chang, Xin Gao
Topics & Concepts
Silicon tetrachlorideMicroreactorVacuum distillationDistillationImpurityUltravioletSiliconFourier transform infrared spectroscopyMaterials scienceProcess engineeringChemistryChemical engineeringOptoelectronicsOrganic chemistryCatalysisEngineeringInnovative Microfluidic and Catalytic Techniques InnovationTiO2 Photocatalysis and Solar CellsSemiconductor materials and devices