Litcius/Paper detail

Damage characteristics and material removal mechanisms of CVD-SiC in nanotests: A comparative with sintered SiC

Jingguo Zhou, Bin Lin, Jiaxiang Xue, Sigong Li, Yehong Liao, Pengcheng Zhao, Tianyi Sui

2023International Journal of Refractory Metals and Hard Materials20 citationsDOI

Topics & Concepts

Materials scienceBrittlenessComposite materialSilicon carbideIndentationFracture toughnessCeramicChemical vapor depositionNanotechnologyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics