Adsorption Behaviors of Chlorosilanes, HCl, and H<sub>2</sub> on the Si(100) Surface: A First-Principles Study
Yajun Wang, Zhifeng Nie, Qijun Guo, Yumin Song, Li Liu
Abstract
in the experimental method.
Topics & Concepts
AdsorptionTrichlorosilaneChemistryChemisorptionPhysisorptionDichlorosilaneDissociation (chemistry)MoleculeSiliconComputational chemistryPhysical chemistryInorganic chemistryOrganic chemistrySemiconductor materials and devicesSilicon Nanostructures and PhotoluminescenceZnO doping and properties