A wear-resistant silicon nano-spherical AFM probe for robust nanotribological studies
Paul C. Uzoma, Xiaolei Ding, Xiaolei Wen, Lansheng Zhang, Oleksiy V. Penkov, Huan Hu
Abstract
A newly designed silicon nano-spherical tip was shown to exhibit improved elastic modulus, good hardness, and wear resistance which make it suitable for performing nanoscale friction tests.
Topics & Concepts
NanoindentationMaterials scienceNanotribologyTribologyWaferSiliconComposite materialElastic modulusNanoscopic scaleNormal forceNano-NanotechnologyModulusContact mechanicsMetallurgyStructural engineeringMechanicsPhysicsEngineeringFinite element methodForce Microscopy Techniques and ApplicationsDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics