Molecular dynamics simulation of silicon vacancy defects in silicon carbide by hydrogen ion implantation and subsequent annealing
Y. H. Fan, Zongwei Xu, Ying Song, Tianze Sun
Topics & Concepts
Vacancy defectSiliconAnnealing (glass)Ion implantationMaterials scienceMolecular dynamicsHydrogenChemical physicsSilicon carbideIonCrystallographic defectDopingMolecular physicsCrystallographyOptoelectronicsComputational chemistryChemistryMetallurgyOrganic chemistrySilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesThin-Film Transistor Technologies