Sensing-range-tunable pressure sensors realized by self-patterned-spacer design and vertical CNT arrays embedded in PDMS
Chao Xie, Min Zhang, Wei Du, Changjian Zhou, Ying Xiao, Shuo Zhang, Mansun Chan
Abstract
. Benefiting from the designs of the self-patterned spacer and the advantageous combination of CNTs and PDMS, the pressure sensors also exhibit a rapid response/relaxation time of 24/32 ms, and good long-term stability with durability test over 10 000 loading/unloading cycles. On the other hand, the realized pressure sensors with small initial resistance designed show a typical piezoresistive characteristic. For applications, the pressure sensors with large initial resistance designed are suitable for the anti-noise applications with pressure thresholds to filter unnecessary noise and save power consumption, while the pressure sensors with small initial resistance designed show the capability of detecting mechanical forces and monitoring human physiological signals. Moreover, the self-patterned design and fabrication method of the spacers also show potentials to be applied in the existing works to further enhance or adjust the performance of those pressure sensors, showing great flexibility. This design demonstrates great potentials to be applied in future advanced flexible wearable systems such as health monitoring, human-machine interaction and the Internet of Things.