Flexible nanoimprint lithography enables high-throughput manufacturing of bioinspired microstructures on warped substrates for efficient III-nitride optoelectronic devices
Siyuan Cui, Ke Sun, Zhefu Liao, Qianxi Zhou, Leonard Jin, Conglong Jin, Jiahui Hu, Kuosheng Wen, Sheng Liu, Shengjun Zhou, Shengjun Zhou
Topics & Concepts
Nanoimprint lithographyMaterials scienceFabricationLithographyNanotechnologyNitrideOptoelectronicsMicrostructureThroughputSubstrate (aquarium)Computer scienceComposite materialLayer (electronics)TelecommunicationsOceanographyPathologyAlternative medicineWirelessGeologyMedicineNanofabrication and Lithography TechniquesGaN-based semiconductor devices and materialsMetal and Thin Film Mechanics