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Electrical and structural comparison of (100) and (002) oriented AlN thin films deposited by RF magnetron sputtering

Anis Suhaili Bakri, N. Nafarizal, Ahmad Shuhaimi Abu Bakar, Megat Muhammad Ikhsan Megat Hasnan, Nur Amaliyana Raship, Wan Ibtisam Wan Omar, Zulkifli Azman, Riyaz Ahmad Mohamed Ali, W.H. Abd. Majid, M. K. Ahmad, Ali Aldalbahi

2022Journal of Materials Science Materials in Electronics20 citationsDOI

Topics & Concepts

Materials scienceThin filmDielectricSputter depositionAluminium nitrideCrystallinityNitrideSputteringElectrical resistivity and conductivityCavity magnetronAluminiumOptoelectronicsComposite materialNanotechnologyLayer (electronics)Electrical engineeringEngineeringGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesMetal and Thin Film Mechanics
Electrical and structural comparison of (100) and (002) oriented AlN thin films deposited by RF magnetron sputtering | Litcius